Key facts
- Brand
- Agilent
- Model
- 4500 ICP-MS
- Documents
- 5
- Languages
- EN
- Last added
- 2012-07-02
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Agilent 4500 ICP-MS Silicon Wafer Surface Metals Characterization Application Note
The document details a technique combining Vapor Phase Decomposition (VPD) and Inductively Coupled Plasma Mass Spectrometry (ICP-MS) for characterizing trace metal contaminants on silicon wafers. This method allows for sample preparation and analysis in less than 30 minutes, enabling real-time monitoring of wafer production.
Read onlineAgilent 4500 ICP-MS specifications
| Analysis Time | less than 30 minutes |
|---|---|
| Detection Limits | part per trillion and sub part per trillion |
| RF Power | 930 Watts |
| Carrier Gas Flow | 1.0 L/min |
| Blend Gas Flow | 0.55 L/min |
Source: Agilent 4500 ICP-MS Silicon Wafer Surface Metals Characterization Application Note
All Agilent 4500 ICP-MS documents by type
How to use the product for one specific task, with worked examples.
- Agilent 4500 ICP-MS Silicon Wafer Surface Metals Characterization Application Note 6 p
- Agilent 4500 ICP-MS Application Note for Determining Vanadium and Nickel in Heavy Oil 4 p
- Agilent 4500 ICP-MS with LSX-100 Semiquantitative Analysis Application Note 6 p
- Agilent 4500 ICP-MS Semiquantitative Analysis Application Note 6 p
Questions answered in these manuals
How many elements can be analyzed in a single droplet?
The technique allows for the accurate analysis of up to 40 elements in a single droplet.
From: Agilent 4500 ICP-MS Silicon Wafer Surface Metals Characterization Application Note
How long does it take to prepare and analyze a silicon wafer sample?
Wafer sample preparation and analysis can be performed in less than 20 minutes.
From: Agilent 4500 ICP-MS Silicon Wafer Surface Metals Characterization Application Note
What metals does this method determine in heavy oil?
The method determines vanadium and nickel in heavy oil.
From: Agilent 4500 ICP-MS Application Note for Determining Vanadium and Nickel in Heavy Oil
What is the typical sample uptake rate for the 4500 ICP-MS?
The instrument is typically operated at a sample uptake rate of 0.4 mL/min.
From: Agilent 4500 ICP-MS Application Note for Determining Vanadium and Nickel in Heavy Oil
How long does the sample analysis take including loading?
The sample analysis time, including sample loading, is approximately three minutes.
From: Agilent 4500 ICP-MS with LSX-100 Semiquantitative Analysis Application Note
What is the diameter of the laser crater achieved during analysis?
The resulting crater was approximately 30um in diameter.
From: Agilent 4500 ICP-MS with LSX-100 Semiquantitative Analysis Application Note