This document is an instruction manual for TPS-mobile vacuum technologies, describing the usage instructions and technical specifications for different models ranging from 969-8400 to 969-8433.
The document is a comprehensive user manual for the Varian (now Agilent Technologies) TPS-mobile integrated vacuum pumping system. It covers multiple models ranging from 969-8400 to 969-8433, which include various configurations of turbomolecular pumps and foreline pumps.
The guide details safety precautions, installation procedures for high and low vacuum flanges, electrical connections, and serial communication protocols. It also includes technical specifications, descriptions of the pump components, and information on accessories and spare parts.
| Storage Temperature Range | -20 °C to +70 °C |
|---|---|
| Relative Humidity (Non-condensing) | 0% to 95% |
| Storage Duration | 10 months from shipping date |
The system is capable of pumping any type of gas or gaseous compound, but it is not suitable for liquids or solid particles.
If the storage time is longer than 10 months, the pumping system must be returned to the factory for reconditioning.