The Scanning Microwave Microscope Mode is a new scanning probe microscope (SPM) that combines the electromagnetic measurement capabilities of a microwave vector network analyzer (VNA) with the nanometer-resolution and Angstrom-scale positioning capabilities of an Atomic Force Microscope (AFM).
The document introduces the Agilent Technologies' Scanning Microwave Microscope (SMM) Mode as a new type of Scanning Probe Microscope. It explains how this technology integrates the electromagnetic measurement capabilities of a microwave vector network analyzer (VNA) with the high-resolution positioning of an Atomic Force Microscope (AFM). This combination allows for calibrated, traceable measurements of electrical properties like impedance and capacitance at the nanometer scale.
The SMM combines the electromagnetic measurement capabilities of a microwave vector network analyzer with the nanometer-resolution positioning capabilities of an atomic force microscope to enable calibrated, traceable measurements of electrical properties such as impedance and capacitance.
The SMM typically operates at microwave frequencies between 1.5 and 6 GHz.
The SMM can measure capacitance changes on the order of 0.1 aF across a 0.1 fF base capacitance.