Honeywell HAF Series Zephyr Digital Mass Flow Sensor Datasheet

The Honeywell HAF series Zephyr digital mass flow sensor provides high‑accuracy gas flow measurement with I2C output and multiple flow‑range options.


Honeywell HAF Series Zephyr Digital Mass Flow Sensor Datasheet - cover page
Brand
Honeywell
Category
Other device
Document type
Datasheet
Language
Chinese
Pages
16
File format
PDF
File size
1.5 MB
Published
03 October, 2026
Updated
03 October, 2026
MD5 checksum
659EFA7B0C2FBA420ED43B45BED8827D

About this manual

The Zephyr™ digital mass flow sensor family from Honeywell delivers precise mass‑flow measurements for gases such as air, helium, argon, nitrogen and CO₂. Sensors in the HAF series offer flow‑range options from 10 SLPM up to 300 SLPM, a fast 1 ms response, and a fully calibrated ASIC that provides a digital I²C interface (400 kHz fast mode). Temperature compensation is provided over a 0 °C‑50 °C range, and the device is built to ISO‑9001 standards for reliability.

These sensors are suited for medical (e.g., anesthesia machines), industrial (ventilation, process control) and analytical (spectrometers, fuel‑cell) applications. They support a variety of port types (manifold, 22 mm OD cone, G 3/8 thread), operate from 3 VDC to 10 VDC, and meet RoHS and IEC environmental standards. Detailed mechanical and electrical specifications are provided in the tables. This manual is written in Chinese.

What's inside

  • Features and Advantages
  • Absolute Maximum Ratings
  • Operating Characteristics
  • Performance Parameters
  • Supported Gases
  • Environmental Parameters
  • Material Parameters
  • Installation Guidelines
  • Pin Description

Specifications

Supply voltage3 VDC to 10 VDC
Flow range10 SLPM – 300 SLPM (standard ranges)
Accuracy (Total Error Band)0 %FS to 12.5 %FS = 0.5 % FS (10‑200 SLPM)
Digital interfaceI²C (fast mode 400 kHz)
Maximum pressure rating150 psig (continuous)

Frequently asked questions

What digital interface does the HAF series sensor use?

The sensor provides a digital I²C output that can operate in fast mode at 400 kHz.

Which flow‑range options are available for the HAF series?

Standard flow ranges are 10, 15, 20, 50, 100, 200 and 300 SLPM, with custom ranges also possible.

What supply voltage can the sensor operate from?

The sensor operates from 3 VDC up to 10 VDC.

Download PDF (1.5 MB)

More Honeywell Manuals


View all Honeywell manuals →