Update: 29 September, 2023
This document describes a fluid measuring device for semiconductor manufacturing processes. The device is suitable for various process gases and is designed to be used under normal operating conditions without the risk of ignition or explosion. It comes in high pressure and low pressure specifications, with maximum flow rates of 200L/min and 100L/min respectively. The device has 1/4 and 3/8 connections, and the operating temperature range is -5°C to 40°C. The storage temperature range is -5°C to 50°C. The gas contact parts are made of corrosion-resistant materials and undergo a special surface treatment for high quality and ultra-clean performance.
Brand: MODEL manuals
File format: PDF
Size: -
MD5 Checksum: 6966079F133EA2855669EA4223A77682
Publication date: 21 February, 2012
Downloads: -
PDF Link: Model XR67 Pressure Regulator (For medium flow rate) Manual PDF