This document introduces a digital pressure gauge for the semiconductor industry, which uses a semiconductor strain gauge with proven durability and stability. It is equipped with various intelligent functions such as comparator output, analog output, and loop check function, providing reliable measurement. The sensor part adopts Co-Ni alloy, and the joint part adopts SUS316L, which has excellent corrosion resistance. It adopts a bright and clear large 4-digit LED display, and the display orientation can be selected vertically or horizontally. It has a loop check function for automation of maintenance work, and also has scaling and zero adjustment functions, eliminating the need for tedious adjustments. It can be installed horizontally or vertically, and there are various types of connectors available.
The ZT60 is a semiconductor‑based digital pressure gauge designed for industrial process gases. It features a durable Co‑Ni alloy sensor, SUS316L fittings, and a bright 4‑digit LED display that can be oriented vertically or horizontally. Intelligent functions such as loop‑check, scaling, zero‑adjust, and various output modes provide high‑accuracy measurement.
The gauge supports comparator NPN open‑collector outputs, 4‑20 mA or 1‑5 V DC analog output, and operates from 12‑24 V DC. It is available with horizontal or vertical mounting options and a range of connector types, making it adaptable to many installation scenarios. This manual is written in Japanese.
| Pressure range | 0 ~ -200 kPa, 0 ~ 20 MPa |
|---|---|
| Sensor material | Co‑Ni alloy |
| Fitting material | SUS316L |
| Power supply | 12‑24 V DC, 10 % tolerance, 30 mA max (analog 4‑20 mA) or 50 mA max (1‑5 V) |
| Accuracy | 0.05 % FS/C (high range) |
The 4‑digit LED display can be set to either vertical or horizontal orientation according to user preference.
The gauge can be installed horizontally or vertically, and it offers a variety of connector types and thread options.