XR 63, 64, 65 pressure regulators are specially designed for semiconductor manufacturing processes. They feature very smooth operation, good air tightness and can be configured with pressure sensors.
The XR63, XR64 and XR65 pressure regulators are designed for semiconductor process applications, offering smooth operation, ultra‑clean handling, and digital pressure display. They provide low‑pressure (≈0.5 MPa) and flow ranges from a few mL/min up to 5 L/min, with stable pressure drop and high reliability.
The document lists manufacturing specifications, material options, flow‑characteristic data, connection dimensions, and optional accessories. It also includes safety cautions and ordering instructions for custom configurations. This manual is written in Japanese.
| Maximum flow (XR63) | 20 L/min (normal) |
|---|---|
| Maximum flow (XR64) | 50 L/min or 100 L/min (normal) |
| Maximum flow (XR65) | 500 L/min (normal) |
| Primary pressure (XR63) | 1 MPa |
| Primary pressure (XR64) | 1 MPa or 20 MPa |
| Primary pressure (XR65) | 5 MPa |
| Secondary pressure range | 0.01 – 0.3 MPa or 0.02 – 0.7 MPa |
| Measurement fluid | Various process gases |
| Body material (XR63) | CTFE |
| Body material (XR64/65) | SUS316L |
The XR64 can deliver either 50 L/min or 100 L/min under normal conditions.
The XR65 is rated for a primary pressure of 5 MPa.
The XR64 body is made of SUS316L stainless steel.