This document introduces the features and characteristics of three models of pressure regulators: XR 63, XR 64, and XR 65. XR 63 is designed for low-pressure and small-flow process conditions, with small instantaneous pressure drop and high stability. XR 64 is suitable for medium-flow semiconductor manufacturing processes and has a relatively small size. XR 65 is designed for large-flow process gases and undergoes special purification treatment. All three models of pressure regulators have stable flow characteristics, smooth operation, and accurate measurement.
The XR63/64/65 series are pressure regulators developed for semiconductor processes, offering smooth operation and high reliability. They feature ultra‑clean designs and digital pressure read‑outs using high‑performance pressure sensors where applicable.
The document provides detailed specifications such as maximum flow rates, primary and secondary pressure ranges, material options, and connection dimensions for each model, along with optional accessories and ordering information. This manual is written in Japanese.
| Maximum flow rate (XR63) | 20 L/min (normal) |
|---|---|
| Maximum flow rate (XR64) | 50 L/min or 100 L/min (normal) |
| Maximum flow rate (XR65) | 500 L/min (normal) |
| Primary pressure (XR63) | 1 MPa |
| Primary pressure (XR64) | 1 MPa or 20 MPa |
| Primary pressure (XR65) | 5 MPa |
| Secondary pressure range | 0.01 – 0.3 MPa or 0.02 – 0.7 MPa |
| Measurement fluid | Various process gases |
| Body material | SUS316L |
| Pressure sensor material (XR64/65 optional) | SUS630C 17‑4PH + SiO₂ coating |
| Leak tightness (He vacuum method) | ≤ 1.01 × 10⁻⁶ Pa·m³/s |
The XR64 can deliver either 50 L/min or 100 L/min under normal conditions.
The XR65 is rated for a primary pressure of 5 MPa.
The XR63 model has no sensor, while the XR64 and XR65 can be supplied with one or two sensors as optional accessories.
The regulator bodies are made of SUS316L stainless steel.