Update: 29 September, 2023
This document introduces the features and characteristics of three models of pressure regulators: XR 63, XR 64, and XR 65. XR 63 is designed for low-pressure and small-flow process conditions, with small instantaneous pressure drop and high stability. XR 64 is suitable for medium-flow semiconductor manufacturing processes and has a relatively small size. XR 65 is designed for large-flow process gases and undergoes special purification treatment. All three models of pressure regulators have stable flow characteristics, smooth operation, and accurate measurement.
Brand: MODEL manuals
File format: PDF
Size: -
MD5 Checksum: 8315FEB25E955265F4D763B8427CED28
Publication date: 21 February, 2012
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PDF Link: Model XR 63 64 65 Pressure Regulators Manual PDF