Tektronix 4200A-SCS Parameter Analyzer Product Data Sheet

About this manual

The Tektronix 4200A-SCS is a customizable, fully integrated parameter analyzer designed for semiconductor, material, and process development. It supports simultaneous viewing of current-voltage (I-V), capacitance-voltage (C-V), and ultrafast pulsed I-V characteristics. The instrument is equipped with Clarius software to provide advanced test definition, parameter analysis, plotting, and automation capabilities. This manual is written in Chinese.

What's inside

• Main Performance Specifications
• Clarius Software Features
• Source Measurement Unit (SMU)
• Capacitance Voltage Unit (CVU)
• Ultrafast Pulsed I-V (PMU)
• High Voltage Pulsed Generator (PGU)
• Typical Applications
• Module Installation

Specifications

Frequently asked questions

What is the maximum voltage and current rating for the high-power SMU module?

The high-power Source Measurement Unit (SMU) has a range of ±1 A at ±210 V.

What is the frequency range for AC impedance measurement in the Capacitance Voltage Unit?

The unit supports an AC impedance measurement frequency range from 1 kHz to 10 MHz.

What is the sampling rate of the ultra-fast pulse I-V measurement module?

The Pulse Measurement Unit (PMU) operates with a sampling rate of 200 MSa/s.