Parker's UHP fittings are designed for cost-effective performance in critical applications.
This document provides a comprehensive cross-reference guide for Parker Veriflo Ultra-High Purity (UHP) fittings, designed for cost-effective performance in critical applications such as semiconductor and microelectronics manufacturing. The fittings are suitable for tool refurbishing, manifold boxes, gas cabinets, and gas sticks, offering reliable performance from vacuum to positive pressure environments.
The guide lists Parker part numbers alongside equivalents from major competitors including Swagelok, Hamlet, TK (US & EUR), TK (Asia), Unilok, and Compart. It covers various fitting types including female gland, male gland, short socket weld, socket weld, and male weld configurations across multiple tube sizes.
| Cleanroom Environment | Class 100 cleanroom |
|---|---|
| Material Compliance | SEMI F20 requirements |
| Leak Rate | 1x10^-9 scc/sec He |
| Weld End Design | Square and sharp |
| Welding Equipment | Orbital welding equipment |
Parker Veriflo parts use proprietary Vericlean material specs, while standard Parker parts are a cost-competitive line that meets SEMI F20 standards.
Yes, the UHP fittings are ideal for semiconductor and microelectronics applications such as tool refurbishing and manifold boxes.
They are suitable for applications ranging from vacuum to positive pressure.