Apex Mass Flow Controller Operating Manual MC Series

This manual introduces the features and characteristics of Apex mass flow controllers, including high-accuracy performance, pressure control, 1000 readings per second high-resolution data, adjustable contrast backlight display, STP change, and serial data connection


Apex Mass Flow Controller Operating Manual MC Series - cover page
Brand
APEX
Category
Other Electronics
Document type
User Manual
Language
English
Pages
36
File format
PDF
File size
4.7 MB
Published
13 October, 2023
Updated
13 October, 2023
MD5 checksum
9FAB8155A4B4921B1869C8FCDE8C9BCF

About this manual

This manual provides operating instructions for the Apex MC-Series mass flow controllers, including MCW (low pressure drop), MCS (anti-corrosive), MCQ (high-pressure), MCE (SEMI compatible), MCV (vacuum), and MCD (dual-valve) models. It details features such as high-accuracy performance for over 98 gases, closed-loop pressure control, and data logging capabilities.

What's inside

  • Introduction
  • Quick Start Guide
  • Getting to Know Your Mass Flow Controller
  • Mounting and Filters
  • Connecting Your Gas Flow Controller
  • MCV Controller Operating Notes
  • MCD Dual Valve Controller Operating Notes
  • Power and Signal Connections
  • Displaying Live Data
  • Control and Setpoint Management

Specifications

Supported Gases98+ gases
Readings per second1000
Maximum Common Mode Pressure175 psia
Maximum Differential Pressure75 psi
CalibrationNIST-traceable

Frequently asked questions

Do flow controllers require straight runs of pipe?

No, flow controllers do not require straight runs of pipe upstream or downstream.

How often should the device be calibrated?

Flow controllers should be calibrated annually.

Can the device be mounted upside-down?

Yes, most models can be mounted in any position, including upside-down.

Download PDF (4.7 MB)

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