Agilent Lithography and Nanomanipulation Package is a CAD-based software package that provides a nanolithography tool for scanning probe microscopy (SPM) researchers.
This document describes a CAD-based drawing program designed for use with Agilent 5500, 5400, and 5100 AFM/SPM microscopes. The software provides a user-friendly interface that allows researchers to design shapes such as lines, circles, and boxes for nanolithography applications.
The software runs on a 32-bit Windows NT/2000/XP-based package.
The writing speed is 0.3 pm/s.