Agilent 7700s ICP-MS Direct Measurement of Metallic Impurities in Ammonium Hydroxide Application Note

About this manual

Ammonium hydroxide (NH4OH) is a chemical used in semiconductor manufacturing that must be analyzed for trace metal impurities. Direct analysis of undiluted 20% NH4OH by ICP-MS is challenging due to high vapor pressure causing plasma instability and the risk of metal precipitation.

What's inside

• Introduction
• Experimental
• Results
• Long term stability
• Conclusions

Frequently asked questions

What is the maximum spike concentration used for Method of Standard Additions calibration to avoid precipitation?

The application limits spike concentrations to 100 ppt in 20% ammonium hydroxide to prevent metal precipitation.

How long does the total run time per sample take including uptake and rinse?

The complete analysis cycle for each sample takes 8 minutes and 20 seconds.

What is the approximate relative standard deviation achieved during the long-term stability test?

The instrument maintained a signal stability of approximately 5% RSD over just under 7 hours.