Agilent Mini-IMG Gauge TPS Bench Operation and Cleaning Manual

About this manual

This document serves as a Field Service Manual for users of Varian's Turbo Pumping Systems equipped with Mini-IMG gauges. It details specific startup procedures designed to ensure the long life of the gauge and proper operation of the bench system.

The manual provides critical safety information regarding vacuum equipment cleanliness, specifically warning against the use of silicone oil or grease and Alconox on aluminum parts. It also outlines contact information for Varian/Agilent customer care and technical support offices worldwide.

What's inside

• Hazard and Safety Information
• Vacuum Equipment and Cleanliness
• TPS Bench Operation
• Gauge Operation
• Mini-IMG Cleaning

Frequently asked questions

What is the Mini-IMG gauge rated for regarding pressure?

The gauge is rated for high vacuum from approximately 10% to 10^-19 Torr.

What voltage does the Mini-IMG generate internally?

The gauge generates high voltage of 2 kV from a 24 V supply.

Which gloves should be used when servicing the vacuum equipment?

You must use powder-free butyl or polycarbonate gloves to prevent skin oils.