The LG16 Liquid Flow Sensor series enables fast, non invasive measurements of very low liquid flow rates below 5 ml/min. This product line is especially suited for OEM volume applications requiring small sized components with high performance at low cost. Excellent chemical resistance and bio-compatibility are ensured: The flow path of the LG16 Liquid Flow Sensors is formed by a simple, straight glass capillary. This Swiss made, non invasive sensors are based on Sensirion’s patented CMOSens® Technology (US Patent 6,813,944 B2). The fourth generation MEMS sensors combine a thermal high precision sensor element with amplification circuits and digital intelligence for linearization and temperature compensation on one single microchip – the products core element.
The LG16 series is a Swiss‑made, media‑isolated microfluidic flow sensor that measures very low liquid flow rates (down to sub‑nl/min) without invasive contact. It uses a straight glass capillary and Sensirion's patented CMOSens® technology, offering digital I²C or analog voltage output for OEM integration.
The sensor family covers flow rates from 1.5 pl/min to 5000 pl/min, with pressure resistance up to 200 bar and operating temperatures from +10 °C to +50 °C. Models are available with either analog (0‑5 V) or digital (I²C) interfaces, and detailed electrical, mechanical, and ordering specifications are provided in the document.
| Maximum Flow Rate | 5000 pl/min (LG16‑2000) |
|---|---|
| Lowest Calibrated Flow (LCF) | 0.07 pl/min (LG16‑0025) |
| Digital Resolution at LCF (16 bit) | 0.084 ni/min (LG16‑0025) |
| Accuracy above LCF | 5 % of measured value |
| Operating Temperature Range | +10 °C … +50 °C |
| Overpressure Resistance | 200 bar (LG16‑0025) |
The LG16 can be ordered with an analog output (0‑5 V, model ending in –A) or a digital I²C output (model ending in –D).
The LG16‑2000 model is rated for an over‑pressure resistance of 200 bar.
Supply voltage should be kept below 9 V; exceeding 12 V may cause permanent damage.