This document presents the Tektronix 4200A-SCS parameter analyzer, detailing its integrated modules for I-V, C-V, and pulsed measurements along with Clarius…
The Tektronix 4200A-SCS is a customizable, fully integrated parameter analyzer designed to simultaneously view current-voltage (I-V), capacitance-voltage (C-V), and ultrafast pulsed I-V characteristics. It accelerates development for semiconductors, materials, and processes by offering high-performance measurement capabilities. This manual is written in Chinese.
| High Voltage Pulse Range | ±40 V (80 V p-p), ± 800 mA |
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The standard medium-power source measurement unit (SMU) provides a range of ±210 V at 100 mA.
When configured with the optional 4200-PA module, the SMU can measure currents down to a resolution of 10 aA.
The C-V unit supports an AC impedance measurement frequency range from 1 kHz to 10 MHz.