The Leica DM8000 M and DM12000 M optical inspection microscopes provide high‑throughput, ergonomic, LED‑illuminated inspection for wafers, LCDs and TFTs.
Leica’s DM8000 M and DM12000 M microscopes are designed for fast, accurate inspection of micro‑electronic components such as wafers, LCDs and TFTs. They combine an ergonomic design with integrated LED illumination, macro overview, oblique UV illumination and fast switchable contrast modes to boost productivity and image quality.
Key features include a 40 mm macro field of view, 0.14 µm resolution with UV light, fully integrated LED illumination with up to 25,000 h lifetime, motorized focus with 3.6 nm steps, and a versatile objective suite (Plan APO 150×/0.90, in‑depth darkfield, etc.). The system also offers programmable function buttons, an illumination manager, and motorized aperture control for repeatable imaging conditions.
| Macro field of view | approx. 40 mm |
|---|---|
| LED lifetime | up to 25,000 hours |
| LED color temperature | 4,000 K |
| UV illumination wavelength | 365 nm |
| Maximum resolvable structure size | 0.14 µm |
| Focus travel range | 35 mm |
| Motorized focus step size | 3.6 nm |
| Maximum focus speed | 5 mm/s |
| Objective specification | Plan APO 150×/0.90 |
| Aperture disk positions | 17 stops |
The macro overview captures an object field of approximately 40 mm.
Press the UV button; the system switches to UV light in less than a second.
The integrated LEDs have a long lifetime of up to 25,000 hours.
The focus drive provides a total travel range of 35 mm.