JEOL JSM-6301 Scanning Electron Microscope Operation Manual

About this manual

This document serves as an operation manual for the JEOL JSM-6301 Scanning Electron Microscope. It details the procedures for turning on the instrument, preparing the sample stage, and performing sample exchange operations within the vacuum chamber. The guide also explains how to adjust accelerating voltage and emission current for observation.

What's inside

• The turning on the SEM
• The sample exchange
• The observation with the SEM
• The photography method
• The capturing of the sample image
• The axis adjustment
• The adjustment of the beam axis
• The CL correcting of astigmatism
• The sample removing
• The completing of the operation

Specifications

Frequently asked questions

What is the required vacuum degree for observation?

The vacuum degree in the sample chamber must be adjusted to be lesser than 7.5×10-6 Torr.

What MO disk capacity is supported for saving images?

The manual specifies that only formatted MO disks with a capacity of 128 MB should be used.

How do you turn off the accelerating voltage?

You can rotate the ACCEL VOLTAGE knob anticlockwise to diminish the voltage to 0.0 kV, or type 0 using the INS key.