Agilent 7700s ICP-MS Semiconductor Analysis Application Note

The Agilent 7700s ICP-MS is a high-performance mass spectrometer designed for semiconductor applications, offering unmatched sensitivity, matrix tolerance, interference removal, and stability.


Agilent 7700s ICP-MS Semiconductor Analysis Application Note - cover page
Brand
Agilent
Category
Other
Document type
Application Note
Language
English
Pages
8
File format
PDF
File size
774 KB
Published
12 June, 2012
Updated
28 September, 2023
Model
7700s
MD5 checksum
2C0C70E1FB46FA7FF504C984C3C9009F

About this manual

The Agilent 7700s ICP-MS is designed specifically for semiconductor applications, featuring a PFA nebulizer, platinum interface, and high-transmission ion lens. It combines unmatched sensitivity, matrix tolerance, and interference removal in a compact system with lower cleanroom service requirements than its predecessor, the 7500cs.

What's inside

  • Introduction
  • Basic Performance
  • Improved Interference Removal
  • Long Term Stability
  • Other Reaction Gases
  • Improved Analysis of Organic Solvents

Specifications

Detection Limits (DLs) improvementapproximately 40% higher than 7500cs
Background noise reductionreduced by half
Exhaust flow reduction20% lower than 7500cs
Vanadium Detection Limit in HCI2.29 ppt
Phosphorus Detection Limit in 1% HNO30.4052 ppb

Frequently asked questions

What is the primary application of the Agilent 7700s ICP-MS?

It is configured specifically for semiconductor applications.

How does the 7700s improve interference removal compared to the 7500cs?

It uses a newly developed ORS with longer rods, smaller internal diameter, and higher frequency/cell gas pressure to improve KED and CID.

Can the 7700s analyze organic solvents like isopropyl alcohol?

Yes, it incorporates a frequency-matching RF generator that allows a wide range of organic solvents to be introduced without disturbing the plasma.

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