This manual provides installation, operation, and troubleshooting instructions for the Yamatake CMS series gas mass flow meters.
This document is the user manual for the Yamatake CMS9500/0002/0005/0020/0050/0200/0500 SUS/SUS316 series gas mass flow meters. It details the safety precautions, product specifications, and operational procedures for these devices which utilize the independent μF (MicroFlow) sensor technology.
The manual covers the entire lifecycle of the device, including installation and wiring, operational settings such as state switching and parameter configuration, and troubleshooting for abnormal conditions. It also provides specific specifications regarding pressure loss and flow ranges for various models. This manual is written in Chinese.
| Accuracy | ±3%RD |
|---|---|
| Range Ratio | 100:1 |
| Sensor Type | μF TM (MicroFlow) sensor |
| Material | SUS/SUS316 |
| Flow Range (CMS9500) | 5～500 mL/min (standard) |
| Flow Range (CMS0500) | 5～500 L/min (standard) |
The device achieves an accuracy of ±3%RD.
Yes, but the model must be specifically selected for oxygen use with oil-free piping.
The device realizes a range ratio of 100:1.