The EE-SPX 613, EE-SPY 801/802, and EE-SA 801 are wafer carrier landing sensors that are specifically designed to detect the landing position of wafer carriers.
This manual describes the EE‑SPY801 and EE‑SPY802 wafer carrier seated sensors, including their optical measurement principle, electrical characteristics, and environmental limits. It contains a full specification table, wiring information, and safety precautions.
Installation instructions cover mounting the sensor on a flat surface, torque requirements, wiring gauge, and connection details. Operational guidance explains how to position the sensor, interpret the indicator light, and maintain proper illumination conditions. This manual is written in Japanese.
| Measurement distance (white surface) | 0 ~ 5 mm (90 % reflectivity) |
|---|---|
| Measurement distance (black surface) | 0 ~ 3 mm (10 % reflectivity) |
| Light source | GaAs photodiode, 940 nm |
| Supply voltage | DC 12‑24 V |
| Current consumption | ≤ 30 mA |
| Output type | NPN, ≤ 100 mA |
| Residual output voltage (100 mA load) | ≤ 0.5 V |
| Operating temperature | -10 °C ~ +55 °C |
| Storage temperature | -25 °C ~ +65 °C |
| Weight (sensor only) | 43 g |
| Diameter | 61.0 mm |
It operates from a DC supply of 12 V to 24 V.
The sensor can be used from –10 °C up to +55 °C.