This document introduces the Agilent 7500cs Inductively Coupled Plasma Mass Spectrometer (ICP-MS), designed as an ultimate analysis tool supporting nanotechnology. It features an Octapole Reaction System (ORS) optimized for semiconductor analysis to reduce matrix-induced polyatomic ion interferences, alongside a standard Cool Plasma mode for high-purity acid analysis. The system utilizes Hydrogen or Helium as collision/reaction gases to effectively lower background noise and achieve high sensitivity. This manual is written in Japanese.
| Ion Source Frequency | 7.12MHz |
|---|---|
| Maximum Output Power | 1800W |
| Operating Temperature | 15-30C |
The instrument is operated using Agilent 7500 ChemStation.
The ionization source has a maximum output of 1800W.