This manual provides installation, operation, maintenance, safety, and warranty information for the Varian VHS-6 diffusion pump.
The Varian VHS-6 Diffusion Pump Instruction Manual guides users through safe installation, proper operation, routine maintenance, and troubleshooting of the pump. It emphasizes hazards, required safety interlocks, and personal protective equipment to prevent injury or equipment damage.
The document is organized into sections covering specifications, unpacking, pump‑oil installation, vacuum‑system and cooling‑water connections, electrical wiring, startup and shutdown procedures, periodic inspection, cleaning, part replacement, troubleshooting, and a list of replacement parts.
| Power Rating | 2200 watts |
|---|---|
| Optimum Operating Range | 1 × 10⁻³ to <5 × 10⁻⁹ Torr (0.133 Pa to <0.000000665 Pa) |
| Maximum Pumping Speed (air) | 2400 L/s with standard cold cap |
| Maximum Forepressure (No Load) | 0.65 Torr (86.45 Pa) |
| Fluid Charge | 500 cc |
| Cooling Water Inlet Temperature (max) | 60 °F / 80 °F |
| Recommended Backing Pump Size | 17 CFM |
The pump is warranted for twelve (12) months from the date of shipment.
A backing pump of 17 CFM is recommended.