This user guide introduces the use, installation, safety precautions, etc. of Thorlabs's MAX300 Series NanoMax 3-Axis Flexure Stage product
The Thorlabs MAX300 Series NanoMax 3-Axis Flexure Stage is designed to integrate seamlessly into the Thorlabs Modular Electronic System for high-resolution alignment and positioning applications. It features an innovative flexure design with three types of modular drives: the DRV001 stepper motor drive, the DRV3 differential micrometer, and the DRV004 thumbscrew. Additionally, external piezo actuators are available to increase travel range.
| Weight (without drives) | 800 g |
|---|---|
| Load capacity | 1 kg |
| Travel (Manual coarse and motor) | 4 mm |
| Travel (Manual fine) | 300 µm |
| Travel (Piezo) | 20 micron |
| Resolution (Motor) | 0.06 µm min incremental movement |
| Resolution (Piezo without feedback) | 20 nm |
| Resolution (Piezo with feedback) | 5 nm |
| Arcuate displacement (maximum) | 80 micron |
| Piezoactuated Nominal maximum input voltage | 75 V |
| Piezoactuated Absolute maximum input voltage | 100 V |
| Stepper Motor Maximum input voltage | 24 V |
There are three types of drive available: the DRV001 stepper motor drive, the DRV3 differential micrometer, and the DRV004 thumbscrew.
Yes, external piezo actuators are available to give an additional 20 µm or 80 µm piezo travel.
The load capacity is 1 kg.
The maximum input voltage for the stepper motor is 24 V.