Varian's extensive line of vacuum valves are engineered for reliability, performance, and value. These valves are also engineered to optimize conductance, to operate in a wide variety of applications, and to operate with a minimum of moving parts. This reduces wear and particle generation which contributes to their performance and reliability. Varian valves are manufactured using the highest quality vacuum materials and provide a choice of actuation, and a variety of mounting flanges. All Varian valves are leak checked with the Varian mass spectrometer leak detector and tested prior to shipment to ensure proper operation.
This document presents Agilent's (formerly Varian) extensive line of vacuum valve solutions engineered for reliability, performance, and value. The valves are designed to optimize conductance, operate in a wide variety of applications, and minimize moving parts to reduce wear and particle generation.
The catalog details various valve types suitable for rough-to-high vacuum, high vacuum, ultra-high vacuum (UHV), and special purpose applications such as variable leak control and pump isolation. It includes common applications like semiconductor manufacturing and physics research, along with detailed technical specifications, dimensions, and ordering information for different models.
| Service Life (Cleaned Aluminum) | 250,000 cycles |
|---|---|
| Bakeable To (Variable Leak Valve) | 450°C |
| Closing time (VPI) | <30 milliseconds |
The maximum operating temperature is 40° C.
The valve closes in less than 30 milliseconds.