This document introduces the features and benefits of Varian's ion pumps, including pump types, controller types, SEM pump types and typical application scenarios.
Varian, Inc. Vacuum Technologies presents a comprehensive overview of their ion pump family, including the VacIon Plus series, Diode, Noble Diode, and StarCell pump versions. The document details the evolution of ion pump technology and highlights specific configurations such as Titanium Sublimation Combination Pumps (TSP) designed for high getterable gas pumping speeds. Customized pump configurations are available to meet optional requirements like cryopanel mounting, NEG modules, and integral heaters.
| Pumping Speed Range (Miniature/Appendage) | 0.2 to 8 l/s |
|---|---|
| Pumping Speed Range (Small/Medium) | 20 to 75 l/s |
| Pumping Speed Range (Large size) | 150 to 1000 l/s |
| Current Resolution | 10 nA |
| Leakage Current (SEM) | < 10 nA |
| Vacuum Processing Temperature | 400° C |
| SEM Vacuum Processing Temperature | 450 °C |
| Battery Backup Life | up to 30 days |
Miniature/appendage pumps have a pumping speed range from 0.2 to 8 l/s.
The lowest leakage current in the industry for these pumps is less than 10 nA.
All pumps are factory processed at high temperature (400°) in ultra-high vacuum for thorough outgassing.