The Turbo-V 3K-G system is an advanced solution for thin film applications. It is the only truly "integrated" system in the market, with a fully integrated system with on-board power supply, vent/purge valves control capability, integrated diagnostics, and multiple interface capability. The system also has the lowest power absorption thermal efficiency, new double loop SST cooling channel, reduced power consumption, reduced bearing operating temperature, and oil-free, robust and reliable design. It is the best turbo solution for thin film deposition with the best footprint to performance ratio.
The Varian Turbo-V 3K-G is an advanced, fully integrated vacuum pumping solution specifically optimized for Thin Film Deposition (TFD) processes. It features a robust, oil-free design that eliminates the need for preventive maintenance or oil refills, ensuring reliability over more than 200,000 hours of operation.
| Start-up time | <6 minutes |
|---|
Yes, it is designed to be completely maintenance-free with no oil refill required and no preventive maintenance needed.
It is dedicated to Thin Film Deposition applications such as PVD coating, evaporative sputtering, and glass-coating systems.
Yes, it features a new double loop SST cooling channel that doubles the heat exchange surface.