This document is the instruction manual supplement for HS-16, HS-20, NHS-35 three products, mainly introducing the use methods, precautions and maintenance methods of the products.
This document serves as a supplement to the standard instruction manuals for specific models of diffusion pumps (HS-16, HS-20, and NHS-35) designed for use with Applied Film Coating Systems. It provides specialized information regarding unique spare parts and electrical wiring schematics not covered in the general documentation.
The manual includes critical safety protocols, maintenance guidelines for vacuum equipment cleanliness, specific care instructions for O-rings, and contact details for Varian Vacuum Technologies customer service.
Products are warranted against defects in materials and workmanship for twelve (12) months from date of shipment.
Apiezon L grease is recommended, while silicone types should be avoided.