The SFC4000 CMOSens® Mass Flow Controller is a high-precision mass flow controller with fast response time and analog input/output interface. It uses digital calibration and temperature compensation of sensor signals to accurately control gas flow within a wide range.
The SFC4000 is a high‑accuracy gas mass flow controller that uses Sensirion's CMOSens® patented sensor technology. It integrates the sensing element and A/D conversion on a single CMOS chip, delivering fast response (<0.1 s), wide range (>1:1000) and digital calibration with temperature compensation.
The manual details the controller's performance specifications, electrical connections (Sub‑D 9‑pin), power requirements (+14‑24 VDC), safety rules for various gases, mechanical dimensions, packaging, and ordering options. It also includes comparison charts, wiring diagrams and safety warnings. This manual is written in Chinese.
| Flow range (air equivalent) | 0.05 – 20 ln/min |
|---|---|
| Response time to 100 % set point | 100 ms |
| Input voltage (set point) | 0 – 5 VDC |
| Maximum operating pressure | 10 bar / 145 psi |
| Weight (no configuration) | 230 g |
The response time to reach 100 % of the set point is 100 ms.
T1 and T2 gases with a flash point of at least 300 °C are approved.