Zeiss Ultra-60 Field Emission Scanning Electron Microscope User Manual

About this manual

This manual provides operating instructions for the Zeiss Ultra-60 Field Emission Scanning Electron Microscope (FESEM). It details safety precautions, including radiation warnings and the requirement for qualified staff to operate the instrument. The document outlines the specific procedures for logging into the system, launching the Smart-SEM software, and handling the specimen exchange assembly.

What's inside

• Special Notes or Restrictions
• Safety Precautions
• Logging on to the System
• Sample Loading
• Operation
• Detectors and Apertures

Specifications

Frequently asked questions

Who is authorized to use the instrument?

Users must first be qualified to use the tool by NanoFab staff and issued a SmartSEM user account.

What is the recommended starting EHT?

5 kV is usually a good starting point, unless the sample is exceedingly thin or has charging problems.

Which detector is recommended for low accelerating voltages?

The IN-LENS detector is recommended for superior SE image quality at low accelerating voltages (3 kV or lower).