This product leaflet details the Swagelok DRP Series ultra-high-purity fluoropolymer diaphragm valves, covering features, materials, ratings, and ordering…
The Swagelok DRP Series ultra-high-purity fluoropolymer diaphragm valves are designed for ultra-high-purity chemical distribution systems and equipment. These valves comply with the SEMI standard F57-0301 and feature a patented improved flow path design to reduce hold-up areas and improve cleanliness. They are available in 2-way and 3-way configurations with pneumatic and quarter-turn manual operation options. This manual is written in Chinese.
| Compliance Standard | SEMI standard F57-0301 |
|---|---|
| End Connection Types | Fine thread flare and Nippon Pillar Super 300 |
| Diaphragm Material | Improved PTFE |
| Actuator Materials | 20% glass-filled polypropylene |
| FDA Compliance | FDA 21CFR Part 177 |
| Minimum Actuation Pressure | 60 psig (4.2 bar) |
| Maximum Actuation Pressure | 100 psig (6.8 bar) |
The diaphragm is made of improved PTFE to enhance durability and seal integrity.
Yes, they are suitable for corrosive chemical mechanical polishing (CMP) liquids, DI water, and bulk chemical delivery systems.