Chinese Academy of Sciences Institute of Microelectronics RFG-3000/13.56MHz RF Power Supply User Manual

User manual for the RFG-3000/13.56MHz solid‑state RF power supply, covering specifications, installation, operation, and remote control.


Chinese Academy of Sciences Institute of Microelectronics RFG-3000/13.56MHz RF Power Supply User Manual - cover page
Brand
中国科学院微电子研究所
Category
Power Amplifier
Document type
User Manual
Language
Chinese
Pages
6
File format
PDF
File size
698 KB
Published
01 October, 2026
Updated
01 October, 2026
MD5 checksum
419D49BF5BD3A4EE948171449C7493EF

About this manual

The manual provides the main technical specifications of the RFG-3000/13.56MHz solid‑state RF power supply, including output power range, efficiency, stability, and cooling methods. It also details the mechanical dimensions, weight, and environmental limits.

Installation instructions describe mounting the 3U chassis in a standard rack or using a desktop panel. Operating procedures cover power‑on sequence, local panel controls for power setting, RF on/off, mode selection, and timer function. Remote control can be performed via RS‑232/RS‑485 or an analog interface, with pin assignments listed for external monitoring and control. This manual is written in Chinese.

What's inside

  • Technical Specifications
  • Installation
  • Operation
  • Local Panel Controls
  • Remote Control
  • Mechanical Dimensions
  • Safety Precautions

Specifications

Output Power1 W – 3000 W continuous adjustable
RF Frequency13.56 MHz standard sine wave
RF Stage Efficiency≥86 % at 3000 W, ≥93 % at 1500 W
Power Stability±0.5 % at rated output
Frequency Stability±10 ppm
Maximum Reflected Power600 W for 20–30 s
Harmonic SuppressionSecond harmonic < ‑50 dB, higher harmonics < ‑55 dB
Cooling MethodForced air + water cooling
Dimensions (H×W×D)132 mm × 483 mm × 500 mm
Weight18 kg

Frequently asked questions

How can I turn the RF output on and off?

Press the ON key to enable RF output (green LED lights) or the OFF key to disable it (red LED lights).

What cooling methods are used in this power supply?

The unit uses forced air cooling combined with water cooling.

What is the maximum reflected power the unit can tolerate?

It can tolerate up to 600 W of reflected power for 20–30 seconds.

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