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- 2026-10-01
Featured 中国科学院微电子研究所 manuals
Chinese Academy of Sciences Institute of Microelectronics RFG-3000/13.56MHz RF Power Supply User Manual
The manual provides the main technical specifications of the RFG-3000/13.56MHz solid‑state RF power supply, including output power range, efficiency, stability, and cooling methods. It also details the mechanical dimensions, weight, and environmental limits.
Installation instructions describe mounting the 3U chassis in a standard rack or using a desktop panel. Operating procedures cover power‑on sequence, local panel controls for power setting, RF on/off, mode selection, and timer function. Remote control can be performed via RS‑232/RS‑485 or an analog interface, with pin assignments listed for external monitoring and control. This manual is written in Chinese.
Covers: Technical Specifications · Installation · Operation · Local Panel Controls · Remote Control · Mechanical Dimensions
Latest 中国科学院微电子研究所 manuals
Chinese Academy of Sciences Institute of Microelectronics RFG-3000/13.56MHz RF Power Supply User Manual
User Manual 6 pages · 698 KB · ZHUser manual for the RFG-3000/13.56MHz solid‑state RF power supply, covering specifications, installation, operation, and remote control.
Which document do I need?
User Manual
Day-to-day operation, settings and troubleshooting. Start here if the product is already set up.
Questions answered in 中国科学院微电子研究所 manuals
How can I turn the RF output on and off?
Press the ON key to enable RF output (green LED lights) or the OFF key to disable it (red LED lights).
What cooling methods are used in this power supply?
The unit uses forced air cooling combined with water cooling.