This document is the operational manual for Nordson AP-300/600 plasma systems, providing instructions for system start-up and operation.
This manual describes the operating procedures for the Nordson AP-300/600 plasma cleaning system, covering system start‑up, parameter settings, manual mode operation, and routine shutdown. It is intended for engineers and technicians who run plasma processes on the equipment.
Key sections include detailed start‑up checks, menu tab functions, power and pressure settings, process execution steps, and safety warnings. The document also defines terminology such as SSCM and explains how to interpret pressure readouts on the screen.
| Pump oil type | Fomblin oil |
|---|---|
| Nitrogen pressure limit | ≤ 30 psi |
| Argon pressure setting | 15 psi |
| Power range | 50‑600 W |
| Current power setting | 100 W |
| RF generator on‑time | 60 s |
| Set reaction pressure | 75 mTorr |
| Pressure display limit | 9999 mTorr for >10 000 mTorr |
| SSCM definition | standard cubic cm per minute |
Check that the pump is running, oil level is correct, compressed air, nitrogen (≤30 psi) and argon (15 psi) are on, release the EMO switch, press the green ON button, touch the screen and log in as engineer or technician.
Stop the process via the touch screen, bleed the chamber to atmospheric pressure, press the EMO button, then turn off the pump, nitrogen, argon, and compressed air.
The system can operate from 50 W up to 600 W, with the current setting at 100 W.