This document provides specifications and details for the Anest IWATA ISP Series dry scroll vacuum pumps, including models ISP-90, ISP-250C, ISP-50…
The document presents technical specifications for the Anest IWATA ISP Series of oil-free scroll vacuum pumps. It lists specific models such as the ISP-90, ISP-250C, ISP-50, ISP-500C, and ISP-1000, detailing their ultimate pressure, motor power, noise levels, and voltage requirements. The pumps are designed for applications like sputtering equipment, vacuum deposition, and laboratory use.
| Ultimate pressure (ISP-90) | 21.6 Pa |
|---|
The Air Flush operation is necessary to remove remaining moisture from the pump and recover ultimate pressure.
Do not use explosive, flammable, toxic, or corrosive substances, or substances containing chemicals, solvents, or particles.
No, the user should not disassemble, reassemble, or alter the pump and parts on their side.