Anest IWATA ISP Series Dry Scroll Vacuum Pump Product Leaflet

This document provides specifications and details for the Anest IWATA ISP Series dry scroll vacuum pumps, including models ISP-90, ISP-250C, ISP-50…


Anest IWATA ISP Series Dry Scroll Vacuum Pump Product Leaflet - cover page
Brand
Anest Iwata
Document type
Product Leaflet
Language
English
Pages
4
File format
PDF
File size
599 KB
Published
16 October, 2026
Updated
16 October, 2026
MD5 checksum
BB6B64AFD35D8F6D751E45C217CD293D

About this manual

The document presents technical specifications for the Anest IWATA ISP Series of oil-free scroll vacuum pumps. It lists specific models such as the ISP-90, ISP-250C, ISP-50, ISP-500C, and ISP-1000, detailing their ultimate pressure, motor power, noise levels, and voltage requirements. The pumps are designed for applications like sputtering equipment, vacuum deposition, and laboratory use.

What's inside

  • ISP-90 Specifications
  • ISP-250C Specifications
  • ISP-50 Specifications
  • ISP-500C Specifications
  • ISP-1000 Specifications
  • Model Selection Guide
  • Applications
  • Air Flush Operation
  • Precaution on Usage
  • Precaution on Installation

Specifications

Ultimate pressure (ISP-90)21.6 Pa

Frequently asked questions

What is the purpose of the Air Flush operation?

The Air Flush operation is necessary to remove remaining moisture from the pump and recover ultimate pressure.

What substances should not be used with this vacuum pump?

Do not use explosive, flammable, toxic, or corrosive substances, or substances containing chemicals, solvents, or particles.

Can the user disassemble the pump?

No, the user should not disassemble, reassemble, or alter the pump and parts on their side.

Download PDF (599 KB)

More Anest Iwata Manuals


View all Anest Iwata manuals →