This is a non-magnetic linear motion rolling guide, which is suitable for semiconductor and liquid crystal manufacturing equipment and inspection equipment used in a magnetic field or in a place that must avoid the influence of magnetic force in the equipment using electron beams. The product uses a combination of non-magnetic stainless steel, non-magnetic hard alloy or ceramic as the casing, track rail, and way, and silicon nitride ceramic as the rotating elements, which has excellent corrosion resistance and environmental load capacity.
