563 Ionization Gauge Tube Manual
The Varian 563 Ionization Gauge Tube is a broad-range Bayard-Alpert device designed to measure vacuum pressures from 1x10^-7 Torr in argon down to 6x10^-12 Torr in air. It features a conductive platinum coating on the inside of the glass envelope and a platinum shield to prevent external electrical fields from affecting ion current, ensuring superior performance across its entire range.
Safety is critical when operating this device due to high voltages (up to 1000 volts) and potential ignition sources. The manual emphasizes that the gauge controller and vacuum system must be separately grounded to a common ground to prevent lethal voltage levels in the chamber. Operators are warned against using silicone oil or grease during cleaning and advised to use powder-free butyl or polycarbonate gloves.
You must use powder-free butyl or polycarbonate gloves to prevent skin oils from getting on vacuum surfaces.
Apiezon L grease (Varian Part Number 695400004) is recommended if vacuum grease must be used.