Varian 564 Ionization Gauge Tube Operation and Safety Manual

About this manual

The Varian 564 Ionization Gauge Tube is designed to be rugged and reliable, featuring a conductive platinum coating on the inside of the glass envelope to improve performance in high-pressure ranges. It utilizes a smaller geometry of tube elements to achieve a low X-ray limit, making it usable up to 1x10^-1 Torr in argon and 6x10^-2 Torr in air.

What's inside

• Preface
• Warranty
• Hazard and Safety Information
• Use with Combustibles and Mixtures
• Vacuum Equipment and Cleanliness
• Electrical Connections

Frequently asked questions

What is the maximum pressure range for this gauge in argon?

The 564 tube is usable to 1x10^-1 Torr in argon.

What type of grease is recommended for vacuum equipment?

Apiezon L grease is recommended, as silicone types should not be used.