A high-performance field emission scanning electron microscope featuring a Schottky emitter, advanced optics, and optional detectors for high-resolution…
The TESCAN MIRA3 is a high-performance field emission scanning electron microscope (SEM) designed for high-resolution and low-noise imaging. It features a high-brightness Schottky emitter and unique Wide Field Optics™ design with a proprietary Intermediate Lens (IML). The system supports various chamber sizes (LM, XM, GM) and can be configured for both low- and high-vacuum operations, including an extended low-vacuum mode up to 500 Pa for non-conductive samples.
| Vacuum operation modes | Low- and high-vacuum operations |
|---|---|
| Extended low-vacuum mode pressure | up to 500 Pa |
| Imaging rate | up to 20 ns |
| Ultra-low landing energy | down to 50 eV |
| Sample stage type | 5-axis fully motorized compucentric stage |
BDT consists of the Beam Deceleration Mode (BDM) and an In-Beam detector to detect high-angle BSE and SE signals under standard operating conditions.
Yes, it can be used with the DrawBeam software and an electrostatic Beam Blanker to create features of a few nanometers.