TESCAN VEGA3 is a versatile thermionic emission SEM system for high- and low-vacuum operations, offering high-resolution imaging, modern optics, and…
The VEGA3 SEM system by TESCAN is designed for both high- and low-vacuum operations, supporting a wide range of research and industrial applications. It features high-resolution imaging with a LaB6 emitter, modern optics including a four-lens Wide Field Optics™ design, and analytical potential with motorized stages and advanced detectors. The system also includes automated procedures and user-friendly software for rapid sample examination and analysis.
Configurations include high-vacuum models (VEGA3 SB, SB-EasyProbe) and variable-pressure models (VEGA3 SBU, LMU, XMU, GMU) for investigating both conductive and non-conductive samples. Software tools like EasySEM™ and EasyEDX enable intuitive control and quantitative elemental analysis, while optional modules support advanced applications such as 3D metrology and particle analysis.
| Emitter Type | LaB6 (lanthanum hexaboride) |
|---|---|
| Optics Design | Four-lens Wide Field Optics™ with Intermediate Lens (IML) |
| Scanning Speed | Ultra-fast imaging down to 20 ns/pixel |
| Vacuum Capability | Full operating vacuum reached within minutes |
| Stage Type | 3-axis motorized stage (SB) or 5-axis motorized compucentric stage (LM, XM, GM) |
The VEGA3 SEM system offers LaB6 (lanthanum hexaboride) electron source as an option.
The scanning speed is ultra-fast, down to 20 ns/pixel.
The system can reach full operating vacuum within a few minutes.
The SB chamber has a 3-axis motorized stage, while LM, XM, and GM chambers have a 5-axis motorized compucentric stage.