The KYKY CXF-200/1401 molecular pump user manual provides installation, operation, safety, maintenance instructions and technical specifications.
The KYKY CXF series is a magnetic‑levitation molecular pump designed for high and ultra‑high vacuum applications in semiconductor, coating and scientific research fields. It features five‑axis magnetic bearings, a ceramic‑ball protected rotor and an integrated controller with multiple communication interfaces.
This manual covers safety warnings, unpacking, installation, wiring, commissioning, normal operation, fault troubleshooting, routine maintenance, transport, storage and environmental disposal. Technical data such as pumping speed, pressure limits and dimensions are listed in the specifications section. This manual is written in Chinese.
| Pumping speed (N₂) for CXF-200/1401 | 1280 l/s |
|---|---|
| Maximum continuous outlet pressure | 266 Pa (2 Torr) |
| Rated speed | 30 000 rpm |
| Noise level | < 50 dB |
| Operating temperature range | 5 °C – 40 °C |
Store the pump in a dry, ventilated area with temperature between –20 °C and +55 °C.
Read the manual carefully, ensure proper grounding, verify that the protective gas is sealed, and confirm that all power connections are correct before start‑up.