The Apex® RF generators from Advanced Energy deliver high power density, flexible mounting, and advanced arc management for semiconductor and display…
The Apex® family of RF generators provides remarkably high power density and consistent power delivery for plasma‑based thin‑film processes. Advanced conversion technology eliminates front‑end DC‑to‑DC components, improving reliability and reducing cost of ownership.
The platform offers multiple mounting options (on‑board chamber, on‑tool frame, rack, and shoebox), flexible communications (RS‑232, optional Profibus and DeviceNet), and complies with CE, UL, CSA, and FCC standards. Specifications include models from 1.5 kW to 10 kW, 13.56 MHz frequency, and compact dimensions for easy integration.
| Frequency | 13.56 MHz |
|---|---|
| Dimensions (1.5 kW model) | 132.59 mm (H) × 215.14 mm (W) × 425.96 mm (D) |
| Ambient Operating Temperature | 5 °C min – 40 °C max |
| Communications | RS‑232, optional Profibus, DeviceNet |
They offer higher power density, improved process flexibility, increased yield, lower cost of ownership, and simplified tool integration.
The Apex generators can be mounted on‑board in the chamber, on‑tool frame, rack‑mounted, or in a compact shoebox configuration.
All models include RS‑232 and can be expanded with Profibus or DeviceNet interfaces.
The units operate from 5 °C to 40 °C ambient temperature, with a maximum water coolant temperature of 35 °C.