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- Last added
- 2026-10-01
Featured Advanced Energy manuals
Advanced Energy Apex RF Generators and Power Delivery Systems Product Leaflet
The Apex® family of RF generators provides remarkably high power density and consistent power delivery for plasma‑based thin‑film processes. Advanced conversion technology eliminates front‑end DC‑to‑DC components, improving reliability and reducing cost of ownership.
The platform offers multiple mounting options (on‑board chamber, on‑tool frame, rack, and shoebox), flexible communications (RS‑232, optional Profibus and DeviceNet), and complies with CE, UL, CSA, and FCC standards. Specifications include models from 1.5 kW to 10 kW, 13.56 MHz frequency, and compact dimensions for easy integration.
Covers: Benefits · Features · Mounting Options · Communications Interfaces · Regulatory Compliance · Technical Specifications
Latest Advanced Energy manuals
Advanced Energy Apex RF Generators and Power Delivery Systems Product Leaflet
Product Leaflet 4 pages · 504 KB · ENThe Apex® RF generators from Advanced Energy deliver high power density, flexible mounting, and advanced arc management for semiconductor and display…
Questions answered in Advanced Energy manuals
What benefits do Apex RF generators provide?
They offer higher power density, improved process flexibility, increased yield, lower cost of ownership, and simplified tool integration.
From: Advanced Energy Apex RF Generators and Power Delivery Systems Product Leaflet
What mounting configurations are available for the Apex platform?
The Apex generators can be mounted on‑board in the chamber, on‑tool frame, rack‑mounted, or in a compact shoebox configuration.
From: Advanced Energy Apex RF Generators and Power Delivery Systems Product Leaflet