KLA-Tencor Alpha-Step IQ Surface Profilometer Operating Manual

Alpha-Step IQ is a computerized and highly sensitive surface profiler that can measure roughness, waviness, and step height, with a wide range of applications.


KLA-Tencor Alpha-Step IQ Surface Profilometer Operating Manual - cover page
Brand
KLA-Tencor
Category
Industrial Supply
Document type
User Manual
Language
Chinese
Pages
15
File format
PDF
File size
559 KB
Published
13 March, 2012
Updated
29 September, 2023
MD5 checksum
859D4BB982A82E716AE3BF8B42BDBCD8

About this manual

The Alpha‑Step IQ is a computer‑controlled surface profilometer used to measure roughness, waviness and step height on a variety of materials. This manual provides an overview of the instrument, its hardware layout, and the basic principles of scanning.

Detailed instructions cover system startup, sample loading, probe handling, scan parameter settings, data analysis, calibration procedures and shutdown steps. Safety warnings and tips for preventing probe damage are included throughout. This manual is written in Chinese.

What's inside

  • Instrument Overview
  • Hardware Layout and Basic Operation Principle
  • Basic Operation Procedure
  • Sample Loading
  • Scan Parameter Settings
  • Data Analysis and Calibration
  • Shutdown Procedure

Specifications

Horizontal resolution limitMinimum data point spacing 0.01 µm
Maximum sample size150 mm width, 15 mm thickness

Frequently asked questions

What is the maximum size of a sample that can be measured?

The Alpha‑Step IQ can accommodate samples up to 150 mm wide and 15 mm thick.

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