KLA-Tencor Manuals

KLA-Tencor Alpha-Step IQ Surface Profilometer Operating Manual

The Alpha‑Step IQ is a computer‑controlled surface profilometer used to measure roughness, waviness and step height on a variety of materials. This manual provides an overview of the instrument, its hardware layout, and the basic principles of scanning.

Detailed instructions cover system startup, sample loading, probe handling, scan parameter settings, data analysis, calibration procedures and shutdown steps. Safety warnings and tips for preventing probe damage are included throughout. This manual is written in Chinese.

Covers: Instrument Overview · Hardware Layout and Basic Operation Principle · Basic Operation Procedure · Sample Loading · Scan Parameter Settings · Data Analysis and Calibration