This document introduces an ISO 9001 certified company with 14001 EMS accreditation. The products are characterized by small size and light weight, made of SUS316L material, and feature single-stage or two-stage needle valve and metal seal. The products are used in applications such as high purity semiconductor manufacturing.
About this manual
The document presents YUTAKA's e‑Flow pressure tuning series, detailing pressure ranges, material grades, valve types, and port configurations for each model. It includes selection tables that list first‑stage and second‑stage pressures, flow rates, and construction details such as SUS316L bodies and needle or flat‑seal valves.
A comprehensive gas‑selection list specifies compatible gases for each series, and safety instructions emphasize using gauge pressure values, avoiding mixing YUTAKA products with other brands, and consulting the manual before installation or maintenance. This manual is written in Japanese.
What's inside
- Series Catalog
- Selection Table
- Gas Selection List
- Structure Diagram
- Part Number Table
- Pressure Range Codes
- Safety and Usage Notes
Frequently asked questions
What gas is the L88 series designed for?
The L88 series is developed for BsHs (ジボラン) and NFs (三フッ化窒素).
Can YUTAKA products be mixed with other manufacturers' products?
No, YUTAKA (Crown) products must not be mixed or interchanged with other manufacturers' products.
How are pressure values displayed in the catalog?
All pressures are shown as gauge pressure unless otherwise indicated.