Key facts
- Manuals
- 1
- Languages
- JA
- Last added
- 2012-02-21
Featured YUTAKA manuals
YUTAKA e-Flow Pressure Tuning Whole Implement Product Leaflet
The document presents YUTAKA's e‑Flow pressure tuning series, detailing pressure ranges, material grades, valve types, and port configurations for each model. It includes selection tables that list first‑stage and second‑stage pressures, flow rates, and construction details such as SUS316L bodies and needle or flat‑seal valves.
A comprehensive gas‑selection list specifies compatible gases for each series, and safety instructions emphasize using gauge pressure values, avoiding mixing YUTAKA products with other brands, and consulting the manual before installation or maintenance. This manual is written in Japanese.
Covers: Series Catalog · Selection Table · Gas Selection List · Structure Diagram · Part Number Table · Pressure Range Codes
Latest YUTAKA manuals
YUTAKA e-Flow Pressure Tuning Whole Implement Product Leaflet
Product Leaflet 8 pages · 2.3 MB · JAThis leaflet provides specifications, series options, gas selection, and safety notes for YUTAKA e‑Flow pressure tuning devices used in semiconductor…
Questions answered in YUTAKA manuals
What gas is the L88 series designed for?
The L88 series is developed for BsHs (ジボラン) and NFs (三フッ化窒素).
From: YUTAKA e-Flow Pressure Tuning Whole Implement Product Leaflet
Can YUTAKA products be mixed with other manufacturers' products?
No, YUTAKA (Crown) products must not be mixed or interchanged with other manufacturers' products.
From: YUTAKA e-Flow Pressure Tuning Whole Implement Product Leaflet