ZT17 Pressure Transducer and ZT15 Pressure Transmitter are ultra-high precision and highly reliable pressure transducers developed for the semiconductor industry. It adopts a semi-conductor strain type pressure transducer, which has excellent linearity, stability, repeatability and anti-interference performance.
This manual describes the ZT series pressure transducers and transmitters, including the ZT17 pressure transducer and the ZT15 pressure transmitter. It outlines the design based on semiconductor strain‑gauge technology, ultra‑clean (UC) specifications, and options for high‑purity gas and semiconductor process applications.
The document lists mechanical and electrical specifications, connection types, optional features, and safety precautions. It also provides details on pressure ranges, accuracy, temperature coefficients, power supply requirements, and leak‑tightness criteria. This manual is written in Japanese.
| Pressure Range | 0‑0.3 MPa, 0‑20 MPa |
|---|---|
| Operating Temperature Range | -20 °C to 70 °C |
| Accuracy | 1.0 % F.S. or 0.5 % F.S. (≥0.5 MPa range) |
| Temperature Coefficient (Zero) | 0.196 % F.S./°C |
| Electrical Power Supply (ZT17) | 5 V DC |
| Leak Rate (He vacuum method) | ≤ 5.07 × 10² Pa·m/s |
The devices are designed for various process gases.
Supported threads include 174.3/8 UIR, VCR, SK, and CVC.
It requires a 24 V DC supply with a ±10 % tolerance.