ZT17 Pressure Transducer is a pressure sensor developed for semiconductor industry, which has ultra-low air tightness, high accuracy and high reliability.
The ZT series pressure transducers and transmitters are semiconductor‑gauge devices designed for ultra‑clean (UC) industrial applications such as semiconductor processing and high‑purity gases. They feature low external leak rates, minimal dead‑zone, and a micro‑rough surface to reduce adsorption and particle generation.
The document provides detailed specifications for the ZT17 and ZT15 models, including pressure ranges, temperature limits, accuracy, electrical characteristics, connection thread sizes, and optional options such as CE marking and custom sealing materials. This manual is written in Japanese.