This document is an instruction manual for the ERA-8800FE Electron Probe Surface Roughness Analyzer. It is divided into three parts: Part 1 introduces the scanning electron microscope, Part 2 covers the basic surface roughness analyzing software, and Part 3 discusses the purchased attachments. The manual provides detailed information on installation, operation flow, system principle, observation and measurement procedures, and more.
The ERA-8800FE is a scanning electron microscope that adds four‑channel secondary electron detection for high‑resolution surface roughness measurement. It offers topography, composition, and conventional SEM imaging modes, with a Windows‑based GUI for intuitive control.
The manual covers basic safety precautions, installation of cooling water and oil‑sealed rotary vacuum pumps, system operation, specimen handling, and routine maintenance. Detailed specifications, parts lists, and optional accessories are also included.
| Resolution | 1.5 nm (30 kV), 5 nm (1 kV) |
|---|---|
| Magnification | x20 to x600,000 |
| Electron gun | ZrO/W thermal field emission |
| Acceleration voltage | 0.3 kV – 30 kV |
| Specimen size (max) | 152 mm × 15 mm (diameter) |
| Stage axes | 5 (X, Y, Z, R, T) |
Turn off the AC power supply, ground the system properly, and wait several minutes before working inside the instrument.
The specimen stage is driven by five axes: X, Y, Z, R, and T.
The resolution is 1.5 nm at 30 kV.
It can handle specimens up to 152 mm in diameter and 15 mm in thickness.